We present a rotary-stage microwave probe station suitable for magnetic filmsand spintronic devices. Two stages, one for field rotation from parallel toperpendicular to the sample plane (Out-of-Plane) and the other intended forfield rotation within the sample plane (In-Plane) have been designed. Thesample, probes and micro positioners are rotated simultaneously with thestages, which allows the field orientation to cover $\theta$ from 0 to$90^{\circ}$ and $\varphi$ from 0 to $360^{\circ}$. $\theta$ and $\varphi$being the angle between the direction of current flow and field in aOut-of-Plane and an In-Plane rotation, respectively. The operation frequency isup to 40 GHz and the magnetic field up to 1 T. The sample holder, vision systemand probe assembly are compactly designed for the probes to land on a waferwith diameter up to 3$\,$cm. Using homemade multi-pin probes and commerciallyavailable high frequency probes, several applications including 4-probe DCmeasurements, the determination of domain wall velocity and spin transfertorque ferromagnetic resonance are demonstrated.
展开▼
